Without any additional tools or adjustments, it cleans all common types of boxes, carriers, SMIF-Pod’s and FOUPs. It can be easily connected to the in-house tracking system and seamlessly records the cleaning processes.
This hard-working and compact cleaning genius achieves up to 3 runs per hour. The process control works with latest software technology SECS/GEM and guarantees smooth and smart process workflow. Simple and fast loading ensures that your operators will be well-satisfied with the CleanStep CBIII, too.
Efficiency, reliability and maximum flexibility - it's all in here. See for yourself in the product movie.
Oh, you've got one of those in your fab already. So congratulations, you've done everything right.
What? You haven't got a CBIII in your factory yet? So ok, don’t worry, just hurry up and get one.
For further product details, please contact our sales team: sales@ap-s.de
